Investigation of brazing joints of Al2O3 ceramics to Kovar alloys by Ti+Nb/Mo metallization
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Abstract
Ti+Nb/Mo thin films were deposited onto Al2O3 ceramic by magnetron sputtering with a subsequent nickel-plating to ensure the robust brazing of Al2O3 ceramic to Kovar alloy using the filler of AgCu28. Microstructures of the metallization layer and the brazing joints of Al2O3/Kovar were investigated systematically by scanning electron microscopy (SEM) and energy dispersive X-ray (EDS). The results show that the interfacial reaction layers are created between filler alloys and base materials. Interdiffusion of Ni and Cu at the interface of AgCu/Kovar resulted in the formation of the reaction layer. The metallization layer plays an important role in hindering the formation of intermetallic compounds and relieving residual thermal stress at Al2O3/AgCu interface. In addition, the presence of eutectic region arising from nickel-plating can improve the thickness of the brazing seam and therefore a good bonding betweenAl2O3 ceramic and Kovar was achieved.
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