Characteristic of a 2-DOF air-supported precision positioning table for microelectronic ultrasonic bonding

Based on finite element analysis, the static and dynamic characteristics of a 2-DOF air-supported positioning table were studied in details. The finite element model of the positioning table was established, and the static, modal and transient analyses were discussed, respectively. The static characteristics of the table under static load were investigated through static analysis. The natural frequencies and modal shapes of the positioning table were achieved by modal analysis. By applying the pulse force, the impulse response of the system was investigated. The transient response characteristics of the table were obtained by using the square wave force to simulate the actual working slate of the positioning table. The results show that the positioning table exhibited good performance, and it provides important information for the structure optimization design and control of such air-supported positioning tables.