2-DOF high-speed and high-precision positioning system for IC packaging

In order to overcome the limitation of speed and acceleration of the conventional two-dimensional drived xy precision positioning table with ball screw,a high-speed and high-precision xy positioning table based on voice coil actuator direct-drive,adopted novel flexible decoupling mechanism,was presented.Dynamic design method was discussed.Based on the above,a xy precision positioning table prototype was made.The results of the performance test indicate that the xy table prototype machine is of very high speed,acceleration and precision.And the xy table can meet the high-speed and highacceleration requirement of the modern development of IC packaging.