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3D组装中双面凸点转接板键合技术及可靠性

Bonding technology for double-sided bump interposer and its reliability in 3D assembly

  • 摘要: 为了满足电子设备小型化、高集成化及三维立体组装对高可靠垂直互连的需求,开展双面凸点转接板大尺寸焊球键合技术研究.采用重熔法制备1.2 mm和2.0 mm的Sn63Pb37焊球,并结合激光植球、热冲击(-55 ~ 125 ℃,200周期)与随机振动(15 g rms)试验及有限元分析开展研究.结果表明,所制备焊球组织致密,富Pb相均匀分布,焊点抗剪强度达25 MPa以上,界面形成约0.1 μm连续金属间化合物层;热冲击后,0.76 mm焊球焊点发生失效,而1.2 mm和2.0 mm焊点保持稳定;随机振动后,小尺寸焊点均发生焊盘剥离,大尺寸焊点结构完整.随着焊球直径由0.76 mm增至2.0 mm,应变能密度由0.294 MPa降至0.0426 MPa,下降了85.5%;寿命由259次循环增至3605次循环,提升了13.9倍.大尺寸焊球可显著降低应力集中并提升热-机械可靠性.

     

    Abstract: To meet the demand for high-reliability vertical interconnection in the miniaturization, high integration, and three-dimensional assembly of electronic devices, research on large-sized solder ball bonding technology for double-sided bump interposer was conducted. Sn63Pb37 solder balls with diameters of 1.2 mm and 2.0 mm were prepared using the remelting method, and the investigation was carried out by combining laser ball placement, thermal shock testing (from −55 ℃ to 125 ℃, 200 cycles), random vibration testing (15 g rms), and finite element analysis. The results show that the prepared solder balls exhibit a dense microstructure with uniformly distributed Pb-rich phases; the shear strength of the solder joints exceeds 25 MPa, and a continuous intermetallic compound layer with a thickness of approximately 0.1 μm is formed at the interface. After thermal shock testing, the 0.76 mm solder ball joints experience failure, whereas the 1.2 mm and 2.0 mm solder joints remain stable. After random vibration testing, all small-sized solder joints experience pad peeling, while the large-sized solder joints maintain structural integrity. As the solder ball diameter increases from 0.76 mm to 2.0 mm, the strain energy density decreases from 0.294 MPa to 0.042 6 MPa, a decrease of 85.5%; the fatigue life increases from 259 cycles to 3 605 cycles, an increase of 13.9 times. Large-sized solder balls can significantly reduce stress concentration and improve thermomechanical reliability.

     

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