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Si3N4陶瓷活性金属钎焊覆铜技术研究综述

eview of active metal brazing technology for copper cladding on Si3N4 ceramic

  • 摘要: 随着SiC/GaN等宽禁带功率器件逐渐向大功率密度、高电流和高电压方向发展,对于封装基板提出了更高的需求.氮化硅陶瓷(Si3N4)由于优异的机械性能在电子封装领域已经得到广泛应用.活性金属钎焊法(Active Metal Brazing)因其可实现高界面结合强度和厚铜层焊接,已成为氮化硅陶瓷基板金属化的重要方式.文中围绕AMB-Si3N4陶瓷覆铜基板的材料、工艺、组织和性能展开系统综述.归纳氮化硅的材料选型、制备工艺、界面反应机制并评估了基板在热循环中的失效行为.同时梳理国内外产业化产品的性能差异以及AMB-Si3N4陶瓷覆铜基板规模化制造面临的质量一致性问题.进一步总结空洞率、剥离强度、翘曲和热循环寿命的评价方法与主要失效模式.最后展望了AMB-Si3N4陶瓷覆铜基板在高温高功率电子封装中的发展方向与工程挑战,为推动AMB-Si3N4陶瓷覆铜基板的产业化提供参考.

     

    Abstract: As wide-bandgap power devices such as SiC/GaN have developed toward high power density, high current, and high voltage, higher requirements have been imposed on packaging substrates. Silicon nitride (Si3N4) ceramics have been widely used in electronic packaging due to their excellent mechanical properties. Active metal brazing has become an important metallization method for Si3N4 ceramic substrates because it enables high interfacial bonding strength and thick-copper-layer brazing. In this paper, the materials, processes, microstructures, and properties of copper-clad AMB-Si3N4 ceramic substrate were systematically reviewed. The material selection, fabrication processes, and interfacial reaction mechanisms of Si3N4 were summarized, and the failure behavior of substrates under thermal cycling was evaluated. Additionally, the performance differences among industrialized products both domestically and internationally were reviewed, along with the quality consistency challenges faced in the large-scale manufacturing of copper-clad AMB-Si3N4 ceramic substrate. Furthermore, the evaluation methods and major failure modes for void ratio, peel strength, warpage, and thermal cycling life were summarized. Finally, the development directions and engineering challenges of copper-clad AMB-Si3N4 ceramic substrates in high-temperature and high-power electronic packaging were discussed, providing a reference for promoting the industrialization of copper-clad AMB-Si3N4 ceramic substrates.

     

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