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激光焊Sn3.0Ag0.5Cu/Ni-P微凸点的界面反应与剪切性能

Interfacial Reaction and Shear Properties of Laser-Soldered Sn3.0Ag0.5Cu/Ni-P Microbumps

  • 摘要: 激光焊因局部加热、快速、免助焊剂和易自动化等优势,在微凸点连接领域备受关注,文中对比研究了激光焊与回流焊工艺及回流次数对微凸点微观组织和剪切性能的影响,结果表明,激光焊微凸点界面(Cu,Ni)6Sn5金属间化合物(IMC)层较薄,呈松散颗粒状;随激光能量增加,IMC略增厚;多次回流后转变为密集短棒状,回流焊微凸点初始IMC较厚呈针状,多次回流后变为不规则块状或长棒状,IMC形貌与其固溶Ni含量密切相关,Ni原子分数含量在7.02% ~ 10.13%是颗粒状向棒状转变的临界范围,剪切性能测试表明,无论初始态还是多次回流态,激光焊微凸点(尤其7.5 mJ能量下制备)的平均剪切力始终高于回流焊微凸点,体现了其更优的界面可靠性.

     

    Abstract: Laser welding has garnered significant attention in the field of microbump interconnections due to its advantages such as localized heating, rapid processing, flux-free operation, and ease of automation. A comparative study was conducted on the effects of laser welding and reflow welding processes, as well as the number of reflows, on the microstructure and shear properties of microbumps. The results indicate that the interfacial (Cu,Ni)6Sn5 intermetallic compound (IMC) layer in laser-soldered microbumps is relatively thin and exhibits a loose particulate morphology. With increasing laser energy, the IMC layer slightly thickens, and after multiple reflows, it transforms into dense short rod-shaped structures. Reflow-soldered microbumps initially feature a thicker and needle-like IMC layer, which evolves into irregular blocky or elongated rod-shaped structures following multiple reflows. The morphology of the IMC is closely related to its solid-solution Ni content, with a critical range of 7.02 at.%–10.13 at.% Ni content marking the transition from particulate to rod-like formations. Shear performance tests demonstrate that, both in the initial state and after multiple reflows, laser-soldered microbumps (particularly those fabricated at 7.5 mJ energy) consistently exhibit higher average shear forces compared to reflow-soldered microbumps, highlighting their superior interfacial reliability

     

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