Abstract: Microstructure, Gaussian curvature of surface peaks, and surface spectrum moment characteristics of machining surfaces were inverthgated in this paper. The results show that MWEDM is composed of random distributional peaks and pits of hemisphere and semiellipsoid. MWEDM has no obvious texture direction. Homogeneity and isotropy of height and slope of MWEDM surface are good. MWEDM surface has typical isotropy characteristic. Precision grinding surface is composed of regular prism and groove and has obvious machining texture direction. Homogeneity of slope and isotropy are poor and precision grinding surface has typical anisotropy characteristic. Surface structure of laser assisted microprocessing is conjointly composed of single peak which has one of hyperboloid of two sheets and multi-peak which has saddle shape. The surface of laser assisted microprocessing has no obvious texture direction. Although the surface isotropy is better, homogeneity of height and slope is worse. Although the surface is more close to isotropy, surface homogeneity is worse. Against its particularity, proper evaluation parameters should be chosen when evaluating it.