Abstract: Aimed at the influence of temperature distribution on forming parts caused by scanning paths of filling line of electron beam rapid prototyping technology, finite element model of simultaneous scanning and orderly scanning were established and corresponding experiments were done. The simulation results show that comparing with simultaneous scanning, the forming part quality formed by orderly scanning is better and it can be improved with the offsetting distance shorted. Although with a smaller electron beam current in orderly scanning forming process, the metal powder can also achieved a higher melting temperature and high temperature region, and the forming area is consistent with its scanning area. The equal energy density of each point on the scanning area is help to get relatively smooth forming surface and to easy spread next powder.