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多芯片子系统壳体焊缝气密性

Weld seam sealing technology of multi-chip subsustem shell

  • 摘要: 介绍了多芯片子系统壳体的技术要求,采用不同的Al-Si复合材料加工成统一结构,进行激光焊接,并对焊件进行检漏,研究了Al-Si复合材料的特性.结果表明,随着Si元素含量增加,从Al-40Si到Al-50Si,Al-60Si复合材料,焊缝氦泄漏率逐渐增大,即焊缝密封性逐渐降低;烧结密度是影响焊缝气密性最主要的因素,随着烧结密度增大,焊缝气密性迅速提高;随着粉末粒度增大,复合材料的焊缝氦泄漏率缓慢增大,即焊缝气密性缓慢降低,用5μm粉末为原料进行热压烧结,制得Al-50Si复合材料的密度高达99.6%TD,焊缝氦泄漏率为0.98×10-9 Pa·m3/s,满足了多芯片子系统壳体气密封装要求.

     

    Abstract: Technical requirements of multi-chip subsystem shell were introduced. And uniform structure with different Al-Si composite was manufactured by laser welding. leak detection was also done for these Al-Si speciments. The results indicate that He leakage rate of weld seam increases with the increase of Si contents in the composite. The main factor which effects weld seam-sealing performance is sintered density,i. e. weld seam sealing performance improves rapidly with the increase of sintered density. Meanwhile,weld seam sealing performance becomes worse with increase of powder size. The hot-pressing sintering density of Al-50Si composite is up to 99.6% TD using metal powder with 5? m size,He leakage rate of weld seam is 0.98×10-9 Pa·m3/s,which meet the hermetic package demands of multi-chip subsystem.

     

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