铂金丝超声键合正交试验及焊点质量评价
Orthogonal test and quality evaluation of platinum wire ultrasonic bonding
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摘要: 采用正交试验法对直径为20μm的铂金丝进行超声波键合试验,并通过三轴测量显微镜观察键合区域形貌和测量键合点根部高度.结果表明,在研究的4个参数中,键合时间、搜索高度和超声功率的影响都较大,而键合力的影响较小.通过正交试验法可以快速获得较优的键合参数,最佳工艺条件为:键合力0.013 N,键合功率0.325W(W为键合区宽度),键合时间30 ms,搜索高度0.2 mm.键合点质量可以通过测量键合点根部高度进行评价,当根部高度在4~10μm之间时,引线拉力均在0.03 N以上.而且,当键合区接近椭圆形,且当W≈2D(D为引线丝直径)时,引线拉力较高,当键合区形貌为矩形或有裂纹出现时,拉力则较小.Abstract: Orthogonal test was applied to investigate the ultrasonic bonding of platinum wire with a diameter of 20 μm.The microstructure of bonded area was observed and the height of bonded heel was measured with three-axis measuring microscope.The results indicate that the influence of bonding time, search height and ultrasonic power on the platinum wire tensile force was very notable,while the effect of bonding force was relatively small.The optimized bonding parameters with high efficiency could be obtained through orthogonal test.The optimum conditions are listed as follows:the bonding force was 0.013 N, the bonding power was 0.325 W,the bonding time was 30 ms, and the search height was 0.2 mm.The bonding quality could be evaluated by measuring the height of bonded heel.The tensile force of the bonded wire exceeded 0.03 N when the bonded heel was 4~10 μm.Meanwhile,it was likely to acquire high bonding quality when the welded area was in elliptical shape and the W was equal to approximately 2D.Tensile force was low when the welded area was in rectangular shape or micro cracks appeared.