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电子束变焦——临界温度极值焦点测量法

Varying focus current-extremum temperature of electron beam focus measurement

  • 摘要: 针对电子束焦点难以直接测量的问题,提出一种利用电子束流与金属粉末相互作用产生的熔池温度极值效应测量电子束流焦点的方法.文中分析讨论了电子束流焦点位置的影响因素,通过试验研究了电子束加热过程中粉末熔池温度与聚焦电流的函数规律,发现温度-聚焦电流关系函数的极大值即为聚焦电子束能量密度分布状态的临界转变点.基于扫描电子束粉末烧结过程的这种临界温度特性,提出了一种测量电子束加工过程动态焦点的方法,即变焦-临界温度极值检测的焦点测量法.结果表明,这种方法可以实现电子束焦点位置的快速、高效地检测与定位控制.

     

    Abstract: Utilizing the effect of temperature extremum of powders molten pool caused by the interactive effect of electron beam(EB) with metal powders,the measurement methods of EB focus are studied.The effecting factors on measurement methods are analyzed.During electron beam processing,the rules of metal powders molten pool temperature changing with focusing current are discovered.The peak temperature of metal powder pool corresponds to the critical transferring point of energy density in the dynamic focusing electron beam processing.Based on the temperature characteristics of critical energy density,the measuring method of dynamic focal spot of electron beam is put forward in the paper.The method of measuring dynamic focal spot of electron beam will provide a new prospect for 3D scanning prototyping through changing focus position of EB.

     

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