Abstract: In order to improve the high-speed control capacity of an industrial robot and enlarge its applications in laserwelding and cutting a 3 degree-of-freedom micro mechanism form acro/micro manipulator was proposed.Them icro mechanism structurewas analyzed by comparing different kinds of moving forms. Kinematics equation was established, and mechanics characteristic was optimized.The micro mechanism is compact, weighting only 1 kg with a load capacity more than 3 kg and a precision higher than 0.04 mm, meeting the dem and of high-precision manufacturing.