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微机控制的电子束能量密度分布测量装置的研究

A STUDY OF THE MEASURER FOR THE POWER DENSITY DISTRIBUTION OF ELECTRON BEAM UNDER MICRO-COMPUTER CONTROL

  • 摘要: 本文叙述了微机控制的、用电子束扫描小孔的电子束能量密度分布的直接测量方法。该装置采用DMA双通道的数据采集系统,使用2MHz时钟的微机和2个5μs转换时间的A/D转换器,数据采集速率达400kHz。采集的数据经数据处理后,获得电子束能量密度分布的立体图和等位面曲线。为电子枪性能的评定,研究电子光学系统的理论计算与实际的差异和研究电子束的加工工艺性,提供了准确有效的手段。

     

    Abstract: This paper describes a micro-computer controlled method of measuring the power density distribution of EB by scanning the beam over a pinhole. This is a direct measurement for an EB. A DMA with 2 channels was used for the data-accessing of the measurer. With this technique, the data-accessing rate can run up to 400 kHz, when a micro-computer with 2 MHz clock and two A/D converters with 5 μs converting rate were used. After data-processing, the direct and easily analyzed power distribution figures of profile and "isohypse" can be obtained.The authors provide thus an accurate and effective method of assessing the EB gun, investigating the difference between the theoretical computation and the objective reality of the electron optical system and researching the process technology of EB.

     

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