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先进封装铜柱凸点互连技术及可靠性发展现状

The Development Status On Advanced Packaging Copper Pillar Bump Interconnection Technology and Reliability

  • 摘要: 随着电子元器件朝着轻量化发展,铜柱凸点因其独特的结构而具有更小的尺寸和更高的互连密度,提供了一种高性能、高可靠性的倒装芯片互连方案. 本文对比了传统C4凸点与铜柱凸点的差异,总结出铜柱凸点在结构与性能上的优势和目前存在的一些问题. 讨论了电镀制备铜柱凸点的工艺流程,详细叙述了镀液成分和电镀参数对铜柱凸点质量的影响. 分析了铜柱凸点在热循环和电迁移可靠性方面的表现,包括热老化、热循环、电迁移等试验对铜柱凸点的影响. 最后对铜柱凸点未来发展方向进行了总结和展望.

     

    Abstract: With the rapid development of the lightweight electronic components, copper pillar bump (CPB) provides a high-performance, high-reliability flip-chip interconnect solution with its unique structure, smaller size and higher connection density. In this paper, the differences between conventional C4 bumps and CPB are compared, and the advantages of CPB in terms of structure and performance are summarized, while the challenges faced by CPB are presented. The process flow of the electroplating method is discussed, and the effects of the plating solution composition and plating parameters on the quality of CPB are reviewed. This paper summarizes the performance of CPB in terms of thermal-cycle and electromigration reliability, including the effects of thermal aging, thermal cycling, and electromigration tests on CPB. Finally, the future development direction of CPB is summarized and prospected.

     

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