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等温时效对Cu-Sn IMC焊点的组织与性能影响

Effect of isothermal aging on microstructure and properties of Cu-Sn IMC solder joints

  • 摘要: 采用瞬时液相键合工艺制备芯片叠层互连用Cu-Sn IMC焊点,对IMC焊点进行150 ℃等温时效处理,研究时效条件下纳米Al颗粒对Cu-Sn IMC焊点的组织演化规律及力学性能. 结果表明,添加微量的纳米Al颗粒可有效抑制键合Cu-Sn IMC焊点中界面层的过快生长和空洞的产生. 经等温时效处理后,Cu-Sn-Cu和Cu-Sn0.3Al-Cu IMC焊点中Cu3Sn界面层均逐渐增厚,但是Cu-Sn0.3Al-Cu IMC焊点中Cu3Sn层的生长速率始终低于Cu-Sn-Cu焊点,且空洞数量也明显少于Cu-Sn-Cu焊点. 当等温时效300 h时,两种IMC焊点的抗剪强度为23.1和26.5 MPa,随着时效时间增加到1 500 h后,两种IMC焊点的抗剪强度下降到13.4和17.6 MPa,分别下降44.2%和35.3%. 在时效初始阶段,Cu-Sn-Cu和Cu-Sn0.3Al-Cu IMC焊点的断口形貌呈现穿晶断裂,随着时效时间的增加,Cu-Sn-Cu IMC焊点的断口形貌逐渐转变为沿晶断裂. 对于Cu-Sn0.3Al-Cu IMC焊点,断口形貌仍为穿晶断裂.

     

    Abstract: Cu-Sn IMC solder joints for chip stack interconnects were prepared via transient liquid phase bonding and subsequently subjected to isothermal aging at 150 ℃. The microstructure evolution and mechanical properties of Cu-Sn IMC solder joints modified with Al nanoparticles were studied under aging conditions. The results show that the rapid growth of interfacial layer and the formation of voids in Cu-Sn IMC solder joints can be effectively inhibited by adding trace amounts of Al nanoparticles. During isothermal aging, the Cu3Sn interfacial layer in both Cu-Sn-Cu and Cu-Sn0.3Al-Cu IMC solder joints gradually thickened, but the growth rate of Cu3Sn layer in Cu-Sn0.3Al-Cu IMC solder joints was always lower than that in Cu-Sn-Cu solder joints, and the voids were significantly less than that in Cu-Sn-Cu solder joints. After 300 h of aging, the shear strengths of the two IMC solder joints were 23.1 and 26.5 MPa, respectively. When the aging time was extended to 1 500 h, the shear strengths of the two IMC solder joints decreased to 13.4 and 17.6 MPa, representing reductions 44.2% and 35.3%, respectively. At the initial aging stage, the fracture morphology of Cu-Sn-Cu and Cu-Sn0.3Al-Cu IMC solder joints exhibited transgranular fracture. As aging progressed, the fracture morphology of Cu-Sn-Cu IMC solder joints gradually transitioned to an intergranular fracture, whereas Cu-Sn0.3Al-Cu IMC solder joints retained its transgranular characteristics.

     

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