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Al-glass-Al阳极键合界面及力学性能的分析

Interfacial investigation and mechanical properties of Al-glass-Al anodic bonding process

  • 摘要: 利用两步法阳极键合技术成功实现了Al-glass-Al的连接,利用扫描电镜(SEM)观察Al-glass界面形貌,利用辉光放电发射光谱仪(GD-OES)分析界面元素(K,Na,O,Al)分布规律,利用原子力显微镜(AFM)分析键合前后玻璃的表面形貌,采用万能材料试验机测试了不同工艺参数下试样的力学性能.结果表明,第二次键合界面电流值明显高于第一次键合界面电流值;Al-glass-Al界面结合良好,玻璃两侧界面无明显差异;Al3+有向Na+耗尽层中扩散的趋势,先形成的耗尽层中Na+浓度明显高于后形成的耗尽层;键合过程中,Na+在玻璃表面析出,玻璃表面Ra升高,玻璃表面质量下降是造成玻璃试样沿第二次键合面Al (2)-glass界面断裂的主要原因.

     

    Abstract: The Al-glass-Al joint was successfully bonded by the two-step anodic bonding process. The bonding current in each step of the two-step bonding process was investigated. Scanning electron microscopy (SEM) was performed on the interface for the Al-glass surface. The element profile of the transitional layer was investigated by glow discharge optical emission microscopy (GD-OES). Atomic force microscopy analysis (AFM) was done to investigate the surface roughness on Al-glass. Tensile tests were executed to evaluate the bonding strengths of the specimens. The results indicated that all Al-glass joints displayed a homogeneous microstructure without voids or cracks. There were no differences for the interfacial microstructure between the two sides of the Al. It was also found that Al migrated into the Na+ depletion region, the quantification of Na+ along the depth direction of Al(1)-glass was larger than the Al(2)-glass. Atomic force microscopy mapping results indicated that sodium precipitated from the back of the glass, which makes the roughness of the surface become coarse. The fracture occurred at the glass-Al(2) interfacial area and the Al was destroyed.

     

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