Al<sub>2</sub>O<sub>3</sub>陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响

辛成来,李宁,颜家振

doi:10.12073/j.hjxb.2018390222

Al₂O₃陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响

辛成来,李宁,颜家振

四川大学制造科学与工程学院, 成都 610065

基金项目: 航空科学基金实验室类（01）资助项目（20100119003）

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- 收稿日期: 2017-02-24

Investigation of brazing joints of Al₂O₃ ceramics to Kovar alloys by Ti+Nb/Mo metallization

XIN Chenglai, LI Ning, YAN Jiazhen

School of Manufacturing Science and Engineering, Sichuan University, Chengdu 610065, China

摘要

摘要: 采用磁控溅射在Al₂O₃陶瓷表面沉积了Ti+Nb/Mo金属层，实现了氧化铝陶瓷的金属化，并通过电镀镍提高了金属化效果.采用AgCu28钎料，实现了金属化Al₂O₃陶瓷与Kovar合金的可靠连接.通过扫描电子显微镜和能谱观察了钎缝的微观组织.结果表明，钎料与母材发生了明显的界面反应.Cu元素扩散进入Kovar合金，同时Ni元素扩散进入钎料的富铜区，从而促进AgCu/Kovar连接界面的形成；金属化层在Al₂O₃/AgCu钎料界面处，起到了关键作用，其中铌可以抑制脆性化合物形成，缓解残余应力.金属化层镀镍后，钎缝中AgCu共晶区明显，且钎缝较宽，对提高镀镍试样的钎焊接头强度有一定作用.
- 氧化铝陶瓷 /
- 金属化 /
- 钎焊 /
- 磁控溅射
Abstract: Ti+Nb/Mo thin films were deposited onto Al₂O₃ ceramic by magnetron sputtering with a subsequent nickel-plating to ensure the robust brazing of Al₂O₃ ceramic to Kovar alloy using the filler of AgCu28. Microstructures of the metallization layer and the brazing joints of Al₂O₃/Kovar were investigated systematically by scanning electron microscopy (SEM) and energy dispersive X-ray (EDS). The results show that the interfacial reaction layers are created between filler alloys and base materials. Interdiffusion of Ni and Cu at the interface of AgCu/Kovar resulted in the formation of the reaction layer. The metallization layer plays an important role in hindering the formation of intermetallic compounds and relieving residual thermal stress at Al₂O₃/AgCu interface. In addition, the presence of eutectic region arising from nickel-plating can improve the thickness of the brazing seam and therefore a good bonding betweenAl₂O₃ ceramic and Kovar was achieved.
- Al₂O₃ ceramics /
- metallization /
- braze joint /
- magnetron sputtering

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参考文献(16)

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Al2O3陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响

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Investigation of brazing joints of Al2O3 ceramics to Kovar alloys by Ti+Nb/Mo metallization

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其他类型引用(5)

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目录

Al₂O₃陶瓷Ti+Nb/Mo金属化对其与Kovar合金钎焊连接的组织和力学性能的影响

Investigation of brazing joints of Al₂O₃ ceramics to Kovar alloys by Ti+Nb/Mo metallization